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plasma cleaning system making soot

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  • Aurigema, Andrew N. (KSC-ASRC-491)[ASRC A
    Hey gang, I just cant seem to run my plasma cleaning system without it making soot on the optical surfaces. I am using the very expensive DOW 714 oil in both
    Message 1 of 5 , Jun 10, 2010
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      Hey gang,
       
      I just cant seem to run my plasma cleaning system without it making soot on the optical surfaces.  I am using the very expensive DOW 714 oil in both of my diffusion pumps, have water coolant on the oil traps above the pumps and only have 15kv on the transformer.  Yet the plasma makes soot every time I turn it on.  If I leave it off …….. no soot.
       
      Any ideas on how to eliminate the soot but still be able to use the plasma cleaning system ???
       
      Drew in sunny Florida
       
       
       
    • Aurigema, Andrew N. (KSC-ASRC-491)[ASRC A
      Oops......... that was 704 Dow silicone oil in the pumps From: VacuumX@yahoogroups.com [mailto:VacuumX@yahoogroups.com] On Behalf Of Aurigema, Andrew N.
      Message 2 of 5 , Jun 10, 2010
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        Oops……… that was 704 Dow silicone oil in the pumps

         

        From: VacuumX@yahoogroups.com [mailto:VacuumX@yahoogroups.com] On Behalf Of Aurigema, Andrew N. (KSC-ASRC-491)[ASRC AEROSPACE]
        Sent: Thursday, June 10, 2010 7:56 AM
        To: VacuumX@yahoogroups.com
        Subject: [VacuumX] plasma cleaning system making soot

         

         

        Hey gang,

         

        I just cant seem to run my plasma cleaning system without it making soot on the optical surfaces.  I am using the very expensive DOW 714 oil in both of my diffusion pumps, have water coolant on the oil traps above the pumps and only have 15kv on the transformer.  Yet the plasma makes soot every time I turn it on.  If I leave it off …….. no soot.

         

        Any ideas on how to eliminate the soot but still be able to use the plasma cleaning system ???

         

        Drew in sunny Florida

         

         

         

      • Anderson, Gordon (Hovensa)
        Andrew, Obviously it s contamination reacting with the plasma. Do you clean your whole chamber with acetone every run? Try not to use silicon grease as it
        Message 3 of 5 , Jun 10, 2010
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          Andrew,
          Obviously it's contamination reacting with the plasma.  Do you clean your whole chamber with acetone every run?  Try not to use silicon grease as it will capture contaminants and also migrate everywhere and collect more.  It's also very difficult to remove.  Finger prints are also a source.  Using non powdered latex gloves can help.  
           
           

          Gordon Anderson
          Senior I&E Specialist
          Project Services

           

           


          Hovensa Disclaimer: This message and any attachment to it is intended only for the use of the individual or entity to whom it is addressed; it contains information that is proprietary and confidential, and may be privileged and exempt from disclosure under applicable law. If the reader of this message is not the intended recipient or the employee or agent responsible for delivering the message to the intended recipient, you are hereby notified that any dissemination, distribution or copying of this communication is strictly prohibited. IF YOU HAVE RECEIVED THIS COMMUNICATION IN ERROR, PLEASE: (A) DO NOT READ THIS E-MAIL MESSAGE, FORWARD IT TO ANY PERSON, SAVE IT, PRINT IT, OR OTHERWISE USE IT; (B) DELETE IT FROM YOUR COMPUTER SYSTEM; AND (C) NOTIFY THE SENDER, BY RETURN E-MAIL, OF THE MISTAKEN TRANSMISSION.

          .
        • SVC
          ... -- ____________________________________ Donald M. Mattox Society of Vacuum Coaters 71 Pinon Hill Place NE Albuquerque, NM 87122-1914 Telephone
          Message 4 of 5 , Jun 10, 2010
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            Re: [VacuumX] plasma cleaning system making soot
            Sounds like you may be getting backstreaming from your mechanical pump. What is your crossover pressure? You should never have the mechanical pump open to the chamber below about 80 mTorr. Don


            Hey gang,
             
            I just cant seem to run my plasma cleaning system without it making soot on the optical surfaces.  I am using the very expensive DOW 714 oil in both of my diffusion pumps, have water coolant on the oil traps above the pumps and only have 15kv on the transformer.  Yet the plasma makes soot every time I turn it on.  If I leave it off ŠŠ.. no soot.
             
            Any ideas on how to eliminate the soot but still be able to use the plasma cleaning system ???
             
            Drew in sunny Florida
             
             
             




            -- 
            
            ____________________________________
            Donald M. Mattox
            Society of Vacuum Coaters
            71 Pinon Hill Place NE
            Albuquerque, NM  87122-1914

            Telephone 505/856-7188
            FAX 505/856-6716
            E-mail donmattox@...
            WebSite  http://www.svc.org
          • Aurigema, Andrew N. (KSC-ASRC-491)[ASRC A
            No I don t clean it between runs. It is pretty big and cleaning it is a day long adventure. I do keep it clean though so there is not any random oils just on
            Message 5 of 5 , Jun 10, 2010
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              No I don’t clean it between runs.  It is pretty big and cleaning it is a day long adventure.  I do keep it clean though so there is not any random oils just on the surfaces.  The soot is pretty uniform so it must be made from lots of surfaces all over the place. 

               

              Is soot generation a problem for anybody else ???

               

               

              From: VacuumX@yahoogroups.com [mailto:VacuumX@yahoogroups.com] On Behalf Of Anderson, Gordon (Hovensa)
              Sent: Thursday, June 10, 2010 8:56 AM
              To: 'VacuumX@yahoogroups.com'
              Subject: [VacuumX] RE: plasma cleaning system making soot

               

               

              Andrew,

              Obviously it's contamination reacting with the plasma.  Do you clean your whole chamber with acetone every run?  Try not to use silicon grease as it will capture contaminants and also migrate everywhere and collect more.  It's also very difficult to remove.  Finger prints are also a source.  Using non powdered latex gloves can help.  

               

               

              Gordon Anderson

              Senior I&E Specialist

              Project Services

               

               

               


              Hovensa Disclaimer: This message and any attachment to it is intended only for the use of the individual or entity to whom it is addressed; it contains information that is proprietary and confidential, and may be privileged and exempt from disclosure under applicable law. If the reader of this message is not the intended recipient or the employee or agent responsible for delivering the message to the intended recipient, you are hereby notified that any dissemination, distribution or copying of this communication is strictly prohibited. IF YOU HAVE RECEIVED THIS COMMUNICATION IN ERROR, PLEASE: (A) DO NOT READ THIS E-MAIL MESSAGE, FORWARD IT TO ANY PERSON, SAVE IT, PRINT IT, OR OTHERWISE USE IT; (B) DELETE IT FROM YOUR COMPUTER SYSTEM; AND (C) NOTIFY THE SENDER, BY RETURN E-MAIL, OF THE MISTAKEN TRANSMISSION.

              .

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